LATERALLY EXCITED BULK WAVE RESONATOR AND FABRICATING METHOD THEREOF
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United States of America Patent
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Issued Date -
Jul 20, 2023
app pub date -
Nov 17, 2022
filing date -
Jan 18, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A laterally excited bulk wave resonator includes a supporting plate; a piezoelectric base having a back side attached to the supporting plate, in which a cavity is defined on a side of the supporting plate facing toward the piezoelectric base; a lower interdigital transducer provided at a back side of the piezoelectric base and located in the cavity; and an upper interdigital transducer provided at a front side of the piezoelectric base corresponding to the lower interdigital transducer. A first interdigital electrode of the lower interdigital transducer has a same polarity as a second interdigital electrode of the upper interdigital transducer at a position corresponding to the first interdigital electrode.
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