PIEZOELECTRIC DEVICE
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Oct 25, 2022
filing date -
Dec 28, 2021
priority date (Note) -
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Abstract
A piezoelectric device includes a base member, a first conductive film arranged above the base member in contact with an upper surface of the base member, a piezoelectric film arranged above the first conductive film in contact with an upper surface of the first conductive film, a second conductive film arranged on the piezoelectric film, and an insulating portion provided inside a trench penetrating through the piezoelectric film and the first conductive film. The insulating portion has a higher electrical resistivity than the piezoelectric film.
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