METHOD AND SYSTEM FOR DETERMINING BEAM POSITION
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Dec 23, 2021
filing date -
Dec 23, 2021
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Abstract
Methods and systems to determine positions of multiple beamlets includes performing a first scan by scanning the beamlets over a first sample region and acquiring multiple cell images; and performing a second scan by scanning the beamlets over a second sample region and acquiring multiple cell images. Each cell image corresponds to a beamlet, and at least a part of an overlapped region between the first sample region and the second sample region is scanned by multiple beamlets during both the first scan and the second scan. Position of each beamlet may then be determined based on the corresponding cell images acquired during the first scan and the second scan.
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