EPITAXIAL REACTOR SYSTEMS AND METHODS OF USING SAME
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Dec 22, 2022
filing date -
Dec 23, 2021
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Abstract
A reactor system may comprise a first reaction chamber and a second reaction chamber. The first and second reaction chambers may each comprise a reaction space enclosed therein, a susceptor disposed within the reaction space, and a fluid distribution system in fluid communication with the reaction space. The susceptor in each reaction chamber may be configured to support a substrate. The reactor system may further comprise a first reactant source, wherein the first reaction chamber and the second reaction chamber are fluidly coupled to the first reactant source at least partially by a first reactant shared line. The reactor system may be configured to deliver a first reactant from the first reactant source to the first reaction chamber and a second reaction chamber through the first reactant shared line.
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