LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PRODUCING LOADED BODY
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Jun 8, 2021
filing date -
Jun 8, 2020
priority date (Note) -
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Abstract
Nanoclusters are produced in a gas phase using a nanocluster manufacturing section including: a vacuum container; a sputtering source that has a target as a cathode, performs magnetron sputtering by pulse discharge, and generates plasma; a pulse power source that supplies pulsed power to the sputtering source; a first inert gas supply section that supplies a first inert gas to the sputtering source; a nanocluster growth cell that is contained in the vacuum container; and a second inert gas introduction section that introduces a second inert gas into the nanocluster growth cell. A multitude of supports are rolled in the gas phase and each of the supports is sprinkled with a multitude of nanoclusters to cause each support to support the multitude of nanoclusters.
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