Aluminum-Scandium Composite, Aluminum-Scandium Composite Sputtering Target And Methods Of Making
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Jun 3, 2021
filing date -
Jun 5, 2020
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Abstract
An Al—Sc alloy sputtering target. The target comprising from 1.0 at % to 65 at % scandium and from 35 at % to 99 at % aluminum and having a microstructure including a first aluminum matrix phase and a second phase dispersed uniformly therethrough. The second phase comprises one or more compounds corresponding to the formula ScxAly, where x is from 1 to 2 and y is from 0 to 3.
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