MICRO ELECTRO MECHANICAL SYSTEMS SENSOR AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Jun 29, 2023
app pub date -
Feb 16, 2023
filing date -
Sep 1, 2020
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Abstract
A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.
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