Ferroelectric Device
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United States of America Patent
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Issued Date -
Jun 22, 2023
app pub date -
Dec 13, 2022
filing date -
Dec 21, 2021
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Abstract
Example embodiments relate to ferroelectric devices. An example ferroelectric device layer structure includes a first electrode. The ferroelectric device layer structure also includes a second electrode. Additionally, the ferroelectric device layer structure includes a ferroelectric layer of hafnium zirconate (HZO). Further, the ferroelectric device layer structure includes an oxide layer of Nb2O5 or Ta2O5 arranged on the ferroelectric layer. The ferroelectric layer and the oxide layer are arranged between the first electrode and the second electrode.
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