Ethynyl derived composite, a composition comprising thereof, a method for manufacturing a coating by it, and a method for manufacturing a device comprising the coating

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United States of America Patent

PATENT NO 11914296
APP PUB NO 20230194989A1
SERIAL NO

18113089

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Abstract

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[Problem to be Solved] An object is to provide a compound with good heat resistance. And another object is to provide a coating made exhibits less film shrinkage, good gap filling property and good planarization. [Solution] The present invention provides an ethynyl derived composite and a composition comprising thereof. And the present invention provides a method for manufacturing a coating by it, and a method for manufacturing a device.

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Patent Owner(s)

  • MERCK PATENT GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hama, Yusuke Kakegawa, JP 10 13
Matsuura, Yuriko Kakegawa, JP 10 26
Nakasugi, Shigemasa Yamato, JP 16 27
Sekito, Takashi Kakegawa, JP 20 58
Yanagita, Hiroshi Kakegawa, JP 37 135

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