PRECURSORS AND RELATED METHODS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20230193462A1
SERIAL NO

18082215

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Some embodiments relate to a precursor comprising a precursor for vapor deposition. The precursor comprises an aliphatic hydrocarbon and at least one disilylamine group. The at least one disilylamine group is attached to the aliphatic hydrocarbon. The at least one disilylamine group does not comprise a silanide group. Some embodiments relate to a method for making the precursor. The method comprises reacting a polyamine compound and a silylhalide compound in a presence of a base to form a precursor useful for vapor deposition. Some embodiments relate to a method for forming a silicon-containing film using the precursor.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

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  • 2022 Application Filing Year
  • C23C Class
  • 2441 Applications Filed
  • 670 Patents Issued To-Date
  • 27.45 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, SeongCheol Suwon-si, KR 11 2
Kim, YoonHae Suwon-si, KR 24 191
Lee, SangJin Suwon-si, KR 65 638
Park, KieJin Gwacheon-si, KR 11 421
Ryu, MinSeok Namdong-gu, KR 6 0
Yeon, YeRim Suwon-si, KR 11 3

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  • C23C Class
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges25323162101 - 1011 - 2021 - 3002004006008001000120014001600180020002200240026002800

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