PRECURSORS AND RELATED METHODS
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jun 22, 2023
app pub date -
Dec 15, 2022
filing date -
Dec 17, 2021
priority date (Note) -
Published
status (Latency Note)
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Abstract
Some embodiments relate to a precursor comprising a precursor for vapor deposition. The precursor comprises an aliphatic hydrocarbon and at least one disilylamine group. The at least one disilylamine group is attached to the aliphatic hydrocarbon. The at least one disilylamine group does not comprise a silanide group. Some embodiments relate to a method for making the precursor. The method comprises reacting a polyamine compound and a silylhalide compound in a presence of a base to form a precursor useful for vapor deposition. Some embodiments relate to a method for forming a silicon-containing film using the precursor.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ENTEGRIS INC | 129 CONCORD ROAD BILLERICA MA 01821 |
International Classification(s)

- 2022 Application Filing Year
- C23C Class
- 2441 Applications Filed
- 670 Patents Issued To-Date
- 27.45 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kim, SeongCheol | Suwon-si, KR | 11 | 2 |
# of filed Patents : 11 Total Citations : 2 | |||
Kim, YoonHae | Suwon-si, KR | 24 | 191 |
# of filed Patents : 24 Total Citations : 191 | |||
Lee, SangJin | Suwon-si, KR | 65 | 638 |
# of filed Patents : 65 Total Citations : 638 | |||
Park, KieJin | Gwacheon-si, KR | 11 | 421 |
# of filed Patents : 11 Total Citations : 421 | |||
Ryu, MinSeok | Namdong-gu, KR | 6 | 0 |
# of filed Patents : 6 Total Citations : 0 | |||
Yeon, YeRim | Suwon-si, KR | 11 | 3 |
# of filed Patents : 11 Total Citations : 3 |
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Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 2 Age
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