Method of controlling at least two interacting piezoelectric actuators

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United States of America Patent

PATENT NO 12074540
APP PUB NO 20230188057A1
SERIAL NO

17912634

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Abstract

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A method is provided of controlling at least two interacting piezoelectric actuators for commonly displacing an object attached thereto. The method comprises the following steps: a. Step A: applying a first cyclic drive voltage signal with a constant frequency to the first piezoelectric actuator, b. Step B: applying a second cyclic drive voltage signal with a constant frequency to said second piezoelectric actuator, whereby the frequencies of the first and second cyclic drive voltage signals are substantially identical and whereby the frequencies of the first and second cyclic drive voltage signals are substantially oppositely phased, and in which at least in a predetermined time period the cyclic drive voltage signals in step A and B are synchronized such that at least one time phase is comprised in which the drive voltage signals of the first and second piezoelectric actuators have both a gradient of decreasing or increasing the respective drive voltage signal having the same sign or one of these gradients is zero and the other is not zero.

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Patent Owner(s)

Patent OwnerAddress
PHYSIK INSTRUMENTE (PI) GMBH & CO KG76228 KARLSRUHE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burhanettin, Koc Ettlingen, DE 2 1

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