COMPOUND, PRODUCTION METHOD THEREFOR, ACID GENERATOR, COMPOSITION, RESIST FILM, UNDERLAYER FILM, PATTERN FORMATION METHOD, AND OPTICAL COMPONENT

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United States of America Patent

APP PUB NO 20230185191A1
SERIAL NO

17924277

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Abstract

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To provide a compound which is high in sensitivity and which provides high resolution and high flatness. A compound represented by the following formula (P-0):

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INCTOKYO 100-8324
THE SCHOOL CORPORATION KANSAI UNIVERSITY3-35 YAMATE-CHO 3-CHOME SUITA-SHI OSAKA 5648680

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ECHIGO, Masatoshi Tokyo, JP 137 625
KUDO, Hiroto Osaka, JP 8 3
OMATSU, Tadashi Kanagawa, JP 61 370
SATO, Takashi Kanagawa, JP 973 9680

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