IRRADIATOR AND PLASMA APPARATUS
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United States of America Patent
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Issued Date -
May 18, 2023
app pub date -
Mar 22, 2021
filing date -
Mar 22, 2021
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Abstract
An irradiator includes: a piezoelectric transformer accommodated in a housing; a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer; and an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma. At least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening.
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