MICROCHANNEL SENSOR AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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May 18, 2023
app pub date -
Mar 30, 2021
filing date -
Mar 30, 2021
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Abstract
A microchannel sensor for detecting radiation and/or particles, the microchannel sensor comprising at least one sensor substrate, wherein said sensor substrate comprises a plurality of channels extending from a first side of the substrate to an opposite side of the substrate, wherein said channels are arranged along a channel axis which is tilted relative a normal axis of said substrate, and wherein said plurality of channels comprise a first set of channels with a first cross section and a second set of channels with a second cross section being different from said first cross section.
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