LASER PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
May 18, 2023
app pub date -
Mar 2, 2021
filing date -
Mar 2, 2021
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Abstract
A laser processing apparatus includes: an electro-optical element; a laser irradiation unit that irradiates the electro-optical element with laser; a pair of electrodes provided on both sides of the electro-optical element so as to sandwich the electro-optical element therebetween; a cushioning material having conductivity provided between the pair of electrodes and the electro-optical element; a shield material that is provided on an incident side of the electro-optical element, in an irradiation direction of the laser intersecting a direction in which a voltage applied by the pair of electrodes is applied, and prevents incidence of the laser onto the cushioning material; and a cooling unit that cools the shield material. The cooling unit includes a cooling block and a pipe connected to the cooling block.
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