Transforming a valve metal layer into a template comprising a plurality of spaced (nano)channels and forming spaced structures therein

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United States of America Patent

PATENT NO 11827992
APP PUB NO 20230144037A1
SERIAL NO

18153878

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Abstract

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At least one embodiment relates to a method for transforming at least part of a valve metal layer into a template that includes a plurality of spaced channels aligned longitudinally along a first direction. The method includes a first anodization step that includes anodizing the valve metal layer in a thickness direction to form a porous layer that includes a plurality of channels. Each channel has channel walls and a channel bottom. The channel bottom is coated with a first insulating metal oxide barrier layer as a result of the first anodization step. The method also includes a protective treatment. Further, the method includes a second anodization step after the protective treatment. The second anodization step substantially removes the first insulating metal oxide barrier layer, induces anodization, and creates a second insulating metal oxide barrier layer. In addition, the method includes an etching step.

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Patent Owner(s)

Patent OwnerAddress
IMEC VZWLEUVEN LEUVEN FLEMISH BRABANT
KATHOLIEKE UNIVERSITEIT LEUVEN KU LEUVEN R&DWAAISTRAAT 6 - BOX 5105 LEUVEN 3000

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Vereecken, Philippe M Hoegaarden, BE 38 433
Zankowski, Stanislaw Piotr Leuven, BE 5 8

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