Storage Cassette for Replaceable Parts for Plasma Processing Apparatus
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United States of America Patent
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Issued Date -
May 11, 2023
app pub date -
Nov 7, 2022
filing date -
Nov 8, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A cassette for a workpiece processing system is provided. The cassette is configured to hold one or more replaceable parts, one or more workpieces and one or more pedestal protectors. The cassette includes a divider configured to separate the one or more replacement parts from the one or more workpieces and/or one or more pedestal protectors. The cassette is configured to be disposed in a storage chamber of a workpiece processing apparatus to facilitate automated replacement of replacement parts in one or more processing chambers. Workpiece processing systems and methods of replacing replacement parts in a workpiece processing system are also provided.
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