SEMICONDUCTOR TESTING DEVICE, SEMICONDUCTOR TESTING METHOD, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
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United States of America Patent
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Issued Date -
May 11, 2023
app pub date -
Feb 25, 2021
filing date -
Aug 29, 2019
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Abstract
A test object includes a first semiconductor element, a first main electrode electrically connected to a positive electrode of the first semiconductor element, a second main electrode electrically connected to a negative electrode of the first semiconductor element, and a first capacitor connected between the first main electrode and the second main electrode. A semiconductor testing device comprises a DC power supply connected between a first probe and a second probe, and a controller. When the first probe is connected to the first main electrode and the second probe is connected to the second main electrode, the controller charges the first capacitor with a DC voltage supplied from a DC power supply, and inputs, to a control electrode of the first semiconductor element, a control signal for turning on the first semiconductor element, after charging the first capacitor.
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