ENERGY BEAM IRRADIATION DEVICE
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United States of America Patent
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Issued Date -
May 4, 2023
app pub date -
Jan 28, 2021
filing date -
Apr 13, 2020
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Abstract
Disclosed is an energy beam emission device including: an electron discharge unit having a long electron discharge part; a housing having a window from which energy beams are emitted on the basis of electrons discharged from the electron discharge part; and a unit accommodation part capable of accommodating the electron discharge unit. A plurality of positioning parts are provided between an outer surface of the electron discharge unit and an inner surface of the unit accommodation part, the positioning parts being slidably in contact with an outer surface of the electron discharge unit or an inner surface of the unit accommodation part and performing positioning of the electron discharge part with respect to the unit accommodation part.
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