METHOD FOR FABRICATING IMPRINT MASTER, THE IMPRINT MASTER, IMPRINT AND ARTICLE
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United States of America Patent
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Issued Date -
Apr 27, 2023
app pub date -
Mar 17, 2021
filing date -
Mar 27, 2020
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Abstract
A method for fabricating an imprint master 1 comprises a first forming step of forming micro-protrusion-and-recess structures 23 having a first average pitch on one surface of a substrate 10 and a second forming step of forming main recesses 21 or main protrusions 22 having a second average pitch larger than the first average pitch on the one surface of the substrate 10 having the micro-protrusion-and-recess structures 23 formed thereon, in a manner maintaining a shape of at least a portion of the micro-protrusion-and-recess structures 23 in the main recesses 21 or the main protrusions 22 while the main recesses 21 or the main protrusions 22 are being formed.
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