METHOD OF TRANSPORTING WORKPIECE AND PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Apr 27, 2023
app pub date -
Oct 20, 2022
filing date -
Oct 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A method of transporting a workpiece includes steps of: (a) adjusting an inclination of a stage including a placement surface on which the workpiece is to be placed such that the placement surface is inclined with respect to a horizontal plane; (b) receiving the workpiece from a transport apparatus configured to transport the workpiece by raising lift pins provided in the stage, before or after step (a); (c) placing the workpiece on the inclined placement surface by performing at least one of lowering the lift pins and raising the stage; and (d) adjusting the inclination of the stage such that the placement surface on which the workpiece is placed is parallel to the horizontal plane.
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