SUBSTRATE HOLDING BOARD, MANUFACTURING METHOD OF DEVICE,AND EXPOSURE DEVICE
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United States of America Patent
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Issued Date -
Apr 27, 2023
app pub date -
Oct 26, 2022
filing date -
Oct 27, 2021
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Abstract
A substrate holding board includes a first layer and a second layer forming an interfacial surface with the first layer. The first layer and the second layer contain diamond-like carbon. A refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength. A distance from the second layer to a topmost surface of the substrate holding board is smaller than a thickness of the first layer.
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