Measuring method

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United States of America Patent

PATENT NO 11682179
APP PUB NO 20230119864A1
SERIAL NO

17542504

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Abstract

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A measuring method includes the following. An image to be tested of an object to be tested with a first characteristic pattern is formed and is copied to form multiple images to be tested. The multiple images to be tested are superimposed to form a to-be-tested overlapped image which has the multiple first characteristic patterns. A reference image of a reference object with a second characteristic pattern is formed and is copied to form multiple reference images. The multiple reference images are superimposed to form a reference overlapped image which has the multiple second characteristic patterns. The to-be-tested overlapped image and the reference overlapped image are superimposed to generate a virtual moiré image having a moiré pattern different from the multiple first characteristic patterns and the multiple second characteristic patterns.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTENO 195 SEC 4 CHUNG-HSING ROAD CHUTUNG HSINCHU R O C

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsieh, Cho-Fan Yilan County, TW 16 15
Li, Yu-Tai Taichung, TW 10 6
Lin, Kao-Chi Kaohsiung, TW 3 0
Peng, Cheng-Yu Taoyuan, TW 12 48
Wu, Teng-Chun Kinmen County, TW 16 73

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