PARTICLE BEAM SYSTEM
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United States of America Patent
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Issued Date -
Apr 6, 2023
app pub date -
Oct 3, 2022
filing date -
Oct 4, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A particle beam system comprises a particle beam column, a detection system and a controller. The particle beam column is configured to generate a particle beam and to direct it onto a sample, as a result of which charged particles are emitted by the sample. The detection system detects charged particles and comprises: an electrode, which can accelerate the charged particles; a potential source, which applies an adjustable electrical potential to the electrode; a scintillator; and a light detector, which outputs a detection signal. The controller controls the potential source and is configured to change the potential on the basis of the detection signal such that the scintillator operates outside its saturation and such that the light detector operates outside its saturation.
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