METHOD OF PREPARING A SPECIMEN FOR SCANNING CAPACITANCE MICROSCOPY
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United States of America Patent
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Issued Date -
Mar 30, 2023
app pub date -
Mar 22, 2022
filing date -
Mar 22, 2022
priority date (Note) -
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Abstract
The present invention discloses a method of preparing a specimen for scanning capacitance microscopy, comprising the steps of: providing a sample including at least one object to be analyzed; manually grinding the sample from an edge of the sample toward a target region containing the object to be analyzed gradually, and stopping at a distance of dl from a longitudinal section of the at least one object to be analyzed in the target region to form a grinding stopping surface; cutting the grinding stopping surface by a plasma focused ion beam equipped with a scanning electron microscopy toward the target region and stopping at a distance of d2 from the longitudinal section to form a cutting stopping surface, wherein 0
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