Lithographic systems and methods of operating the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Mar 5, 2024
Grant Date -
Mar 30, 2023
app pub date -
Dec 5, 2022
filing date -
Dec 5, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Calculated Rating
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US Family Size
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Non-US Coverage
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Abstract
A lithographic system for projecting an image onto a workpiece using radiation is provided. The lithographic system includes: a support structure for supporting a workpiece; a radiation source for providing radiation to project an image on the workpiece; a reticle positioned between the radiation source and the workpiece; and a mask positioned adjacent the reticle, the mask being configured to block radiation from the radiation source, the mask including a heat removal apparatus.
First Claim
Other Claims data not available
Family
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| KR | A | KR20210149168 | Feb 26, 2020 |
| US | B2 | US11550232 | Feb 26, 2020 |
| WO | A1 | WO2020207656 | Feb 26, 2020 |
| CN | B | CN113767335 | Feb 26, 2020 |
| EP | A1 | EP3953766 | Feb 26, 2020 |
| TW | B | TWI853899 | Mar 04, 2020 |
| US | B2 | US11947271 | Dec 05, 2022 |
International Classification(s)
- 2022 Application Filing Year
- G03F Class
- 1894 Applications Filed
- 526 Patents Issued To-Date
- 27.78 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G03F Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Sep 5, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 5, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 5, 2035 |
