THIN FILM CAPACITOR, POWER SOURCE MODULE, AND ELECTRONIC DEVICE
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United States of America Patent
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Issued Date -
Mar 30, 2023
app pub date -
Sep 28, 2022
filing date -
Sep 28, 2022
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Abstract
A thin film capacitor having a multilayer structure including a first electrode, a first dielectric layer, a second dielectric layer, and a second electrode in this order. The second dielectric layer and the second electrode are in contact. The first dielectric layer includes a perovskite type compound. The second dielectric layer includes a perovskite type compound or an oxide of M. When X1 and X2a represents an absolute value of an average energy for formation of an oxide of a cationic element included in a B site of the perovskite type compound included in the first dielectric layer and the second dielectric layer respectively, and X2b represents an absolute value of an average energy for formation of an oxide of M included in the second dielectric layer, then X2a
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