FILTER CLEANING SYSTEM AND FILTER CLEANING METHOD

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United States of America Patent

APP PUB NO 20230091875A1
SERIAL NO

17796014

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Abstract

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A filter cleaning system includes a storage unit that stores liquid that is passed through a filter; a liquid supply path that sends the liquid stored in the storage unit to the filter; a circulation path that returns the liquid sent from the filter to the storage unit; a first supply unit that supplies a first liquid to the storage unit; and a second supply unit that supplies a second liquid having a surface tension lower than that of the first liquid and an affinity for the first liquid, to the storage unit.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ANAMOTO, Atsushi Kumamoto, JP 6 9
KOMIYA, Hiroshi Kumamoto, JP 25 133
OTSUKA, Yuki Kumamoto, JP 27 25

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