Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus
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United States of America Patent
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Issued Date -
Mar 23, 2023
app pub date -
Nov 28, 2022
filing date -
May 14, 2019
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Abstract
Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The processing system can include a loadlock chamber, a transfer chamber, and at least two processing chamber having two or more processing stations. The processing system further includes a storage chamber for storing replaceable parts. The transfer chamber includes a workpiece handling robot. The workpiece handling robot can be configured to transfer a plurality of replaceable parts from the processing stations to the storage chamber.
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