Mach-zehnder interferometric optical modulator with shallow ridge waveguide structure and method for manufacturing the same

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United States of America Patent

PATENT NO 12072600
APP PUB NO 20230073881A1
SERIAL NO

17852173

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Abstract

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Disclosed are a Mach-Zehnder interferometric optical modulator and a method for manufacturing the same. The modulator includes first and second lower clad layers, a core layer, an upper clad layer, a waveguide, and electrodes. The waveguide may include an input waveguide, a waveguide divider, branch waveguides, and a waveguide combiner. Each of the branch waveguides includes first and second connection regions connected to the waveguide combiner and the waveguide divider, respectively, and a phase shift region having a cross-section of a reverse mesa structure that has an upper width that is the same as widths of the first and second connection regions and a lower width that is smaller than the widths of the first and second connection regions.

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Patent Owner(s)

Patent OwnerAddress
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE(GAJEONG-DONG) 218 GAJEONG-RO YUSEONG-GU DAEJEON 34129 34129

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baek, Yongsoon Daejeon, KR 49 287
Han, Won Seok Daejeon, KR 44 157
Han, Young-Tak Daejeon, KR 46 293
Kim, Dong-Young Daejeon, KR 103 836
Kim, Duk Jun Daejeon, KR 29 158
Kim, Ho Sung Daejeon, KR 61 159
Kim, Hyun Soo Daejeon, KR 248 1429
Shin, Jang Uk Daejeon, KR 37 213

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