SURFACE ACOUSTIC WAVE DEVICE
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United States of America Patent
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Issued Date -
Mar 9, 2023
app pub date -
Sep 6, 2022
filing date -
Sep 8, 2021
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Abstract
A surface acoustic wave device includes a piezoelectric substrate formed from a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal, and an interdigital electrode formed on the surface of the piezoelectric substrate and formed from Al. The interdigital electrode is configured to generate a Love-wave-type SH wave on the surface of the piezoelectric substrate. A normalized film thickness obtained by dividing the film thickness of the interdigital electrode by the wavelength of the Love-wave-type SH wave is 0.16 or less.
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