FLUID DELIVERY DEVICE WITH HYDROPHOBIC SURFACE
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United States of America Patent
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Mar 9, 2023
app pub date -
Nov 7, 2022
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Jul 21, 2017
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Abstract
Embodiments of the present invention are directed to a liquid delivery apparatus. A non-limiting example of the apparatus includes a substrate including a cavity formed in a surface of the substrate. The apparatus can also include a membrane disposed on the surface of the substrate covering an opening of the cavity. The apparatus can also include a hydrophobic layer disposed on the membrane. The apparatus can also include a seal disposed between the membrane and the substrate, wherein the seal surrounds the opening of the cavity. The apparatus can also include an electrode layer coupled to the membrane.
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