PVD APPARATUS
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United States of America Patent
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Issued Date -
Feb 16, 2023
app pub date -
Oct 28, 2022
filing date -
Oct 28, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
The PVD apparatus includes a chamber, a plurality of stages, a first target holder, a power supply mechanism, and a shield. The plurality of stages are provided inside the chamber, and each of the plurality of stages is configured to place at least one substrate on an upper surface thereof. The first target holder is configured to hold at least one target provided for one stage, the target being exposed to a space inside the chamber. The power supply mechanism supplies power to the target via the first target holder. The shield is provided inside the chamber and a part of the shield is disposed between a first stage and a second stage in the plurality of stages, and between a first processing space on the first stage and a second processing space on the second stage.
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