METHOD FOR AUTOMATICALLY CLEANING A PROBE CARD AND SYSTEM FOR AUTOMATICALLY PERFORMING A NEEDLE CLEANING
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United States of America Patent
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Issued Date -
Feb 16, 2023
app pub date -
Aug 11, 2021
filing date -
Aug 11, 2021
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Abstract
A method for automatically cleaning a probe card includes the following operations. A first wafer is tested in a chamber of a testing machine. A yield of the first wafer is monitored by a tool online monitor system (TOMS). An instruction file is transmitted by the TOMS to a tester, in which the instruction file compiles a first program code of the TOMS into a second program code of the tester. The second program code of the tester is received by the tester. A general purpose interface bus (GPIB) command is transferred to a testing machine by the tester. A cleaning operation is performed by the testing machine.
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