DISPLACEMENT MAGNIFYING MECHANISM, ACTUATOR, POLISHING DEVICE, ELECTRONIC COMPONENT PROCESSING APPARATUS, DISPENSER, AND AIR VALVE
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United States of America Patent
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Issued Date -
Feb 9, 2023
app pub date -
Jan 7, 2021
filing date -
Jan 7, 2021
priority date (Note) -
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Abstract
A displacement magnifying mechanism, polishing device, actuator, electronic component processing apparatus, dispenser, and air valve which can easily control a drive system. The displacement magnifying mechanism includes a base; a piezoelectric element of which an end is attached to a mounting surface of the base, the piezoelectric element extending along a first longitudinal direction; a support member of which an end is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction; an operating portion attached to each of other ends of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction; and a compression member attached to the base and the operating portion so as to compress the piezoelectric element.
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