Method of imaging a surface using a scanning probe microscope
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United States of America Patent
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Aug 22, 2023
Grant Date -
Feb 2, 2023
app pub date -
Oct 23, 2020
filing date -
Oct 25, 2019
priority date (Note) -
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Abstract
A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.
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