Methods for Fabricating Resistive Change Element Arrays
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United States of America Patent
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Issued Date -
Jan 19, 2023
app pub date -
Sep 19, 2022
filing date -
Sep 19, 2022
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Abstract
A method to fabricate a resistive change element array may include depositing a resistive change material over a substrate and forming a first insulating material over the resistive change material. The method may also include etching a trench in the resistive change material and the first insulating material and forming a cavity in a sidewall of the trench by recessing the resistive change material. The method may further include flowing a conductive material in the cavity and depositing a second insulating material in the trench.
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