SYSTEMS AND METHODS OF OPERATION OF CAPACITIVE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCHES

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United States of America Patent

APP PUB NO 20230012105A1
SERIAL NO

17948371

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Abstract

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Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membrane.

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Patent Owner(s)

Patent OwnerAddress
KONINKLIJKE PHILIPS NVHOLLAND SCHIPHOL SCHIPHOL NORTH HOLLAND

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Budzelaar, Franciscus Paulus Maria Eindhoven, NL 36 214
de, Wild Nico Maris Adriaan Eindhoven, NL 30 83
Dirksen, Peter Hilversum, NL 74 1918
Loebl, Hans-Peter Monschau-Imgenbroich, DE 31 414
Shulepov, Sergei Eindhoven, NL 59 655
Timmermans, Petrus Henricus Maria Teteringen, NL 11 24

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