QUARTZ GLASS CRUCIBLE AND MANUFACTURING METHOD THEREOF

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United States of America Patent

APP PUB NO 20230010489A1
SERIAL NO

17783616

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Abstract

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A quartz glass crucible (1) has a structure wherein a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface (10i) of the crucible is present at a position deeper than the inner surface (10i). In an exemplary embodiment, the quartz glass crucible is capable of improving the yield of a silicon single crystal by suppressing peeling-off of brown rings.

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Patent Owner(s)

Patent OwnerAddress
SUMCO CORPORATION1-2-1 SHIBAURA MINATO-KU TOKYO 105-8634

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KISHI, Hiroshi Akita-shi, Akita, JP 143 1432
KITAHARA, Eriko Akita-shi, Akita, JP 20 35
OHARA, Masami Akita-shi, Akita, JP 11 38

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