Collector flow ring

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11740565
APP PUB NO 20230010251A1
SERIAL NO

17784951

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Systems, apparatuses, and methods are provided for a collector flow ring (CFR) housing configured to mitigate an accumulation of fuel debris in an extreme ultraviolet (EUV) radiation system. An example CFR housing can include a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the CFR housing. The example CFR housing can further include a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the CFR housing. The example CFR housing can further include a shroud mounting structure configured to support a shroud assembly, a cooling flow channel configured to transport a fluid, and a plurality of optical metrology ports configured to receive a plurality of optical metrology tubes.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burke, Jeremy San Diego, US 9 75
Hartung, Taylor John San Diego, US 1 0
Johnson, Esteban Joseph Sandoval Chula Vista, US 1 0
Langlois, Marc Guy Rancho Mirage, US 7 123
Ma, Yue Escondido, US 269 3729

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