FILM FORMING APPARATUS, CONTROL APPARATUS FOR FILM FORMING APPARTUS, AND FILM FORMING METHOD
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United States of America Patent
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Issued Date -
Jan 5, 2023
app pub date -
Sep 9, 2022
filing date -
Sep 9, 2022
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Abstract
A film forming apparatus has a process chamber and a processing unit provided in the process chamber and forming adhesive film. The surface of the inner walls of the process chamber is formed of a material having a large getter effect on gas or water (H2O) remaining in the process chamber.
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