LIQUID FEEDER AND POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Jan 5, 2023
app pub date -
Jun 27, 2022
filing date -
Jun 27, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A liquid feeder includes: a first arm having a first nozzle; a second arm having a second nozzle; a first rotation shaft supporting a proximal end part of the first arm; a second rotation shaft supporting a proximal end part of the second arm; a first rotation driver configured to rotate the first rotation shaft to turn the first arm from a fluid feed position to a retracted position; a second rotation driver configured to rotate the second rotation shaft to turn the second arm from a fluid feed position to a retracted position; and a controller. The first rotation shaft and the second rotation shaft are disposed coaxially with each other. The controller is capable of controlling the operation of the first rotation driver and the operation of the second rotation driver independently of each other.
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