PIEZOELECTRIC SENSOR WITH RESONATING MICROSTRUCTURES
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United States of America Patent
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Issued Date -
Dec 29, 2022
app pub date -
Jun 23, 2021
filing date -
Jun 23, 2021
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Abstract
A sensor system may have a force sensor formed from a piezoelectric film. The piezoelectric film may comprise a number of tuned microstructures that are configured to resonate at a particular frequency. In accordance with the tuning of the microstructures, frequency signals corresponding to the microstructure resonance may be mechanically amplified before being processed by associated processing electronics. The processing electronics may be configured to identify a type of biological vibration detected by the force sensor.
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