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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY	NAVAL RESEARCH LABORATORY 875 NORTH RANDOLPH STREET SUITE 1425 ARLINGTON VA 22203

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Eddy,, JR Charles R	Columbia, US	37	267
Mahadik, Nadeemullah A	Springfield, US	7	7
Mehl, Michael J	Davidsonville, US	5	3
Nepal, Neeraj	Woodbridge, US	9	20
Qadri, Syed B	Fairfax Station, US	42	255

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Jun 22, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jun 22, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jun 22, 2034

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Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
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Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2022/0406,591

Low Temperature Plasma-Assisted Atomic Layer Epitaxy of Hexagonal InN Films and its Alloys with AlN

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