Test apparatus and test method thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12092656
APP PUB NO 20220404395A1
SERIAL NO

17721522

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Abstract

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A test apparatus includes a movable stage to support a sample, tips above the stage that have different shapes and alternately perform profiling and milling on the sample, a tip stage connected to a cantilever coupled to the tips, the tip stage to adjust a position of the cantilever, a position sensor to obtain information about a positional relationship between the tips and the sample, a stage controller to control movements of the stage and the tip stage, based on the information about the positional relationship, and a tip controller to select the tips for performing the profiling or milling and to determine conditions for performing milling, wherein a depth of the sample being processed by the milling in the first direction is controlled based on a relationship between a distance between the tips and the sample and a force between the tips and the sample.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY291 DAEHAK-RO YUSEONG-GU DAEJEON 34141

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Seungbum Daejeon, KR 20 304
Kim, Hoon Daejeon, KR 562 7664
Kim, Kwangeun Suwon-si, KR 9 1
Kim, Souk Seoul, KR 17 10
Ryu, Sungyoon Seoul, KR 14 3
Sohn, Younghoon Seoul, KR 33 28
Yang, Yusin Seoul, KR 27 53
Yeom, Jiwon Nonsan-si, KR 3 0
Yun, Seokjung Iksan-si, KR 12 151

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