Bath systems and methods thereof

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United States of America Patent

PATENT NO 11738363
APP PUB NO 20220388022A1
SERIAL NO

17341105

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carcasi, Michael Austin, US 37 73
Estrella, Joel Austin, US 9 35
Hooge, Joshua Austin, US 19 49
Marumoto, Hiroshi Koshi, JP 33 58
Rotondaro, Antonio Luis Pacheco Austin, US 31 404
Simms, Ihsan Austin, US 7 23

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