CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCE
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United States of America Patent
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N/A
Issued Date -
Dec 1, 2022
app pub date -
Oct 16, 2020
filing date -
Oct 16, 2020
priority date (Note) -
Published
status (Latency Note)
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Abstract
A system includes: an optical source including a plurality of optical oscillators; a spectral analysis apparatus; and a controller. Each optical oscillator is configured to produce a light beam. The controller is configured to: determine, based on data from the spectral analysis apparatus, whether the spectral property of the light beam of one of the optical oscillators is different than the spectral property of the light beam of at least another of the plurality of optical oscillators. If the spectral property of the light beam of the first one of the optical oscillators is different than the spectral property of the light beam of another of the optical oscillators, the controller is configured to adjust the spectral property of the light beam of the first one of the optical oscillators or of the light beam of at least one other of the optical oscillators.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
CYMER LLC | 17075 THORNMINT COURT SAN DIEGO CA 92127 |
International Classification(s)

- 2020 Application Filing Year
- H01S Class
- 1402 Applications Filed
- 877 Patents Issued To-Date
- 62.56 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Zhao, Yingbo | San Diego, US | 11 | 2 |
# of filed Patents : 11 Total Citations : 2 |
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- 0 Citation Count
- H01S Class
- 0 % this patent is cited more than
- 3 Age
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