CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20220385031A1
SERIAL NO

17770344

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A system includes: an optical source including a plurality of optical oscillators; a spectral analysis apparatus; and a controller. Each optical oscillator is configured to produce a light beam. The controller is configured to: determine, based on data from the spectral analysis apparatus, whether the spectral property of the light beam of one of the optical oscillators is different than the spectral property of the light beam of at least another of the plurality of optical oscillators. If the spectral property of the light beam of the first one of the optical oscillators is different than the spectral property of the light beam of another of the optical oscillators, the controller is configured to adjust the spectral property of the light beam of the first one of the optical oscillators or of the light beam of at least one other of the optical oscillators.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

International Classification(s)

loading....
  • 2020 Application Filing Year
  • H01S Class
  • 1402 Applications Filed
  • 877 Patents Issued To-Date
  • 62.56 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zhao, Yingbo San Diego, US 11 2

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 0 Citation Count
  • H01S Class
  • 0 % this patent is cited more than
  • 3 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1306451301 - 1011 - 20010020030040050060070080090010001100120013001400

Forward Cite Landscape

Load Citation