LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20220385022A1
SERIAL NO

17818180

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A control method of a line narrowing gas laser device includes receiving a command of either a single-wavelength mode command or a multi-wavelength mode command from an external apparatus, and controlling the line narrowing gas laser device to generate pulse laser light in accordance with the command.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INCTOCHIGI

International Classification(s)

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  • 2022 Application Filing Year
  • H01S Class
  • 1137 Applications Filed
  • 263 Patents Issued To-Date
  • 23.14 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KUMAZAKI, Takahito Oyama-shi, JP 31 189
WAKABAYASHI, Osamu Oyama-shi, JP 394 4239

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Patent Citation Ranking

  • 4 Citation Count
  • H01S Class
  • 74.20 % this patent is cited more than
  • 3 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1306451301 - 1011 - 20010020030040050060070080090010001100120013001400

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