EPITAXIAL GROWTH DEVICE
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United States of America Patent
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Issued Date -
Dec 1, 2022
app pub date -
Jun 10, 2022
filing date -
Jun 10, 2022
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Abstract
An epitaxial growth device is provided, which includes an induction coil and a reaction body, and the induction coil is disposed along a circumferential direction of the reaction body; and the reaction body includes a heating base and a plurality of trays, wherein the heating base includes a plurality of workspaces, the plurality of trays are disposed in the plurality of workspaces, respectively, and each of the plurality of trays is disposed in a corresponding workspace; wherein each of the plurality of trays is configured to support a substrate, and each of the plurality of trays is capable of independently rotating relative to the heating base.
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