Emitter Structure and Production Method
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United States of America Patent
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Issued Date -
Nov 24, 2022
app pub date -
Aug 3, 2022
filing date -
Aug 3, 2022
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Abstract
An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.
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